Lift-Rotary ZR-BSMA-LY-140H-200-RTLA-30-100
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Lift-Rotary stage offer precise and independent rotation and vertical translation for light to medium payload.
This stage combines BSMA-LY-140H-200 as vertical stage and rotary table RTLA-30-100 in very compact form factor for precision space constrained applications.
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|
Lift Z Stage BSMA-LY-140H-100 |
Spec |
Rotary Stage RTLA-30-100 |
Spec |
|
Lift stroke |
100 mm |
Rotation |
unlimited |
|
Repeatability |
± 10 µm |
Repeatability |
± 36 arc-sec |
|
Resolution |
1 µm |
Resolution |
1 arc-sec |
|
Lift velocity |
100 mm/sec |
Angular velocity |
5 rpm |
|
Mechanism |
ball screw |
Mechanism |
worm gear 180:1 |
|
Motor |
stepper/servo |
Motor |
stepper/servo |