XY-OF-UL-280x280+ACR260UT
Open-frame low profile XY-Rotary stages designed for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. XY drive mechanism located on the side of the unit and large center hole-through rotary table offer a clear unobstruced access to the wafer from both sides.
 XY-OF-UL-200x200+ACR160UT XY-OF-UL-200+ACR160UT Stroke 200x200 mm Aperture 160x160 mm Load 30 Kg |
XY-OF-UL-350x350+ACR335UT XY-OF-UL-350-ACR335UT Stroke 350x350 mm Aperture 335x335 mm Load 30 Kg |
Parameters |
Unit |
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XY table
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| Rotary table |
ACR-160UT |
ACR-335UT |
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Motor type |
brushless servo motor /encoder (standard) linear servo motor (option) |
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XY stroke |
mm x mm
|
200 x 200 |
- |
280 x 280
|
- |
350 x 350
|
- |
| Angular rotation | deg | - |
360 |
- |
360 |
- |
360 |
|
Center aperture |
dia mm |
160 |
260 |
335 |
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Resolution (linear) |
micron |
1 (note 1,2) 2.5 (note 3) |
- |
1 (note 1,2) 2.5 (note 3) |
- |
1 (note 1,2) 2.5 (note 3) |
- |
| Resolution (rotary) | arc-sec | - |
1.4 |
- |
1 |
- |
0.9 |
|
Repeatability (linear) |
micron |
5 (note 3) 1 (notes 1,2) |
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| Repeatability (rotary) | arc-sec | 2 | |||||
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Speed |
mm/sec |
400 (note 3) 800 (note 2) |
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| Load weight | kg | 30 | |||||
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Stage weight |
kg |
16 |
22 |
28 |
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(note 1) with linear encoder (option)
(note 2) with linear servo motor (option)
(note 3) ball screw 10 mm lead, brushless servo driven
