XY-OF-UL-200x200+ACR160UT
Open-frame XY-Rotary stages designed with a low profile for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. XY drive mechanism located on the side of the unit and large center hole-through rotary table offer a clear unobstruced access to the wafer.
 XY-OF-UL-280x280+ACR260UT XY-OF-UL-280+ACR260UT Stroke 280x280 mm Aperture 260x260 mm Load 30 Kg |
XY-OF-UL-350x350+ACR335UT XY-OF-UL-350-ACR335UT Stroke 350x350 mm Aperture 335x335 mm Load 30 Kg |
Parameters |
Unit |
XY-OF-UL-200x200+ACR160UT
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XY table
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| Rotary table |
ACR-260UT |
ACR-335UT |
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Motor type |
brushless servo motor /encoder (standard) linear servo motor (option) |
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XY stroke |
mm x mm
|
200 x 200 |
- |
280 x 280
|
- |
350 x 350
|
- |
| Angular rotation | deg | - |
360 |
- |
360 |
- |
360 |
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Center aperture |
dia mm |
160 |
260 |
335 |
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Resolution (linear) |
micron |
1 (note 1,2) 2.5 (note 3) |
- |
1 (note 1,2) 2.5 (note 3) |
- |
1 (note 1,2) 2.5 (note 3) |
- |
| Resolution (rotary) | arc-sec | - |
1.4 |
- |
1 |
- |
0.9 |
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Repeatability (linear) |
micron |
5 (note 3) 1 (notes 1,2) |
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| Repeatability (rotary) | arc-sec | 2 | |||||
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Speed |
mm/sec |
400 (note 3) 800 (note 2) |
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| Load weight | kg | 30 | |||||
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Stage weight |
kg |
16 |
22 |
28 |
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(note 1) with linear encoder (option)
(note 2) with linear servo motor (option)
(note 3) ball screw 10 mm lead, brushless servo driven
