- XY stroke 750 x 250 mm
- Lift 12 mm
- Rotation unlimited
- Integrated solution
Integrated turn-key system consists of XY system BSMA motorized ball screw actuators, and Lift-Rotary stage LSZ-12+PSR-150-30 stage
Clean room version available.
XY Stage BSMA-110
|
Spec |
Lift Stage LSZ-12W |
Spec |
Rotary Stage PSR150-30 |
Spec |
Stroke (mm) |
750x250 |
Lift (mm) |
12 |
Rotation |
unlimited |
Repeatability (µm) |
5 |
Repeatability (µm) |
2 |
Repeatability (arc-sec) |
2 |
Resolution (µm) |
1 |
Resolution (arc-sec) |
1 |
Resolution (arc-sec) |
2 |
Load capacity (kg) |
12 |
Bearings |
ball |
Bearings |
ball |
Velocity (mm/sec) |
400 |
Max velocity (mm/sec) |
12 |
Angular velocity (rpm) |
300 |
Mechanism, screw lead (mm)
|
ball screw 20 |
Mechanism |
ball-screw/wedge |
Mechanism |
direct drive rotary motor |
Motor |
stepper servo |
Motor |
stepper servo |
Motor |
servo |