Lift-Rotary LSZ12W+PSR150-30
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Lift Z Stage LSZ12W |
Spec |
Rotary Stage PSR150-30 |
Spec |
|
|
|
|
Lift stroke |
12 mm |
Rotation |
unlimited |
Repeatability |
± 2 µm |
Repeatability |
± 2 arc-sec |
Resolution |
1 µm |
Resolution |
± 2 arc-sec |
Lift payload |
10 kg |
Torque |
6 Nm |
Lift velocity |
25 mm/sec |
Angular velocity |
180 rpm |
Mechanism |
ball screw /wedge |
Mechanism |
direct drive |
Motor |
servo |
Motor |
servo |