Rotary table PSR-150

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Description Specifications Drawings Related

Planar ServoRing rotary tables provide superior angular positioning and are designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives. Low maintenance and high throughput characteristics of the Planar ServoRing stage yields the lowest total cost of ownership.

Compact package and Superior design of the Planar ServoRing rotary stages was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. ULTRATHIN ServoRing stage has large clear center aperture that can be used for air or wire line feed-through or beam delivery.

Planar ServoRing utilizes direct drive three phase planar brushless motor technology. There are no brushes to replace and no gear trains or belts to maintain. “Lo-Cog” magnetic design assures smooth rotation and dynamic performance.

Accurate Positioning is assured with contactless encoder. The motor and rotary encoders are directly coupled to eliminate coupling backlash. The low inertia and zero backlash make Planar ServoRing the ideal solution for applications requiring frequent directional changes.

Semiconductor assembly	Electronics assembly
Precision machine tools	Robotic handlers
Wafer processing	Automation

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Rotary table PSR-300 PSR-300 Diameter 290 mm Aperture 115 mm Height 42 mm	Rotary Tables SRT03-SRT10 SRT03-SRT10 Diameter 125 mm Aperture 65 mm Height 85 to 135 mm Load 30 kg	Rotary table PSR-180UT (Ultrathin) PSR-180UT Diameter 180 mm Aperture 55 mm Height 22 mm	Rotary table PSR-200 PSR-200 Diameter 200 mm Aperture 40 mm Height 42 mm
Rotary table PSR-150 PSR-150 Diameter 152 mm Aperture 15 mm Height 42 mm	Rotary table ACR-160UT (Ultrathin) ACR-160UT Diameter 287 mm Aperture 158 mm Height 22 mm	Rotary table ACR-260UT (Ultrathin) ACR-260UT Diameter 387 mm Aperture 259 mm Height 22 mm	Rotary table ACR-335UT (Ultrathin) ACR-335UT Diameter 463 mm Aperture 335 mm Height 22 mm
Rotary table PSR-200MHS PSR-200MHS Diameter 200 mm Aperture 55 mm Height 42 mm	Rotary table PSR-300MHS PSR-300MHS Diameter 290 mm Aperture 145 mm Height 42 mm	Rotary Tables SRT01 SRT01 Diameter 115 mm Aperture 30 mm Height 70 mm Load 20 kg	Rotary table ACR-32UT (Ultrathin) ACR-32UT Diameter 116 mm Aperture 32 mm Height 22 mm
mSRT100-24 mSRT100-24 Diameter 100 mm Aperture 24 mm Height 57.5 mm Load 30 kg	SRT115-45-OR SRT115-45-OR Diameter 115 mm Aperture 45 mm Height 50 mm Load 50 kg

System performance	Unit	PSR 150		PSR 200

Tabletop diameter	mm	140		200
Height	mm	40		42
Aperture	mm	15		40
Motor type		Three phase brushless Y winding (standard) Δ winding (optional)
Number of pole pairs	P	13		17
Peak Torque	Tp (Nm) (note 1)	23		45
Continuous torque	Tc (Nm) (note 2)	8.7		17
Peak current	Amp	14
Continuous current	Amp	5.1
Sine encoder standard optional	Lines/rev (note 3)	2,048 3,600		2,048 10,000
Digital encoder standard optional	Counts/rev (note 4)	409,600 (note 4)		409,600 (note 4)
Axial load	Kg (note 5)	30		50
Bus voltage	VDC VAC	150 120	310 220	150 120		310 220
Max. speed @ Tp	RPM (note 6)	330	790	175		430
Rated speed @ Tc	RPM (note 6)	900	2000	335	725
Bearing run-out	Microns (note 7)	15 (-N), 10(-P), 5 (-SP)
Rotor inertia	Kg·m²	0.004		0.01
Stage weight	Kg	5		7
Construction		Rotor – steel Stator - aluminum

Planar

Note 1	1sec. duration, coil at 20°C
Note 2	Coil at 120°C
Note 3	1V_pp differential, quadrature, index mark
Note 4	RS422, TTL, 5VDC, differential, quadrature, index mark Digital resolution = Fundamental resolution * Interpolation Factor * 4 Internal interpolation available x5, x10, x25, x50 (standard), x100 External interpolation available x200, x250
Note 5	Load capacity rated at 1/10 of bearing L₁₀rating
Note 6	Rated speed based on amplifier bus voltage and motor “Y” winding. Higher speed (Δ) winding on request. Actual speed depends on the encoder resolution, interpolation factor and load.
Note 7	-N standard ABEC 5 bearing, -P precision ABEC 7 bearing

Linear and Rotary Motion in its Simplest Form™

Rotary table PSR-150

Linear and Rotary Motion in its Simplest Form^™