XYR-65-10x10-AUT-ACR-65AUT
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XY-Rotary stages with linear motors and direct torque motors designed with a low profile for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. XY drive linear motor drive provides sub-micron XY positioning and direct drive rotary stage assures sub-arcsec performance
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Parameters |
Unit |
XY-65-10x10-AUT-ACR-65AUT
|
|
XY table
|
||
| Rotary table | ||
|
Motor type |
XY linear servo motor |
|
|
XY stroke |
mm x mm
|
10x10 |
| Angular rotation | deg | 50 |
|
|
||
|
Resolution (linear) |
micron |
0.5 |
| Resolution (rotary) | arc-sec | 0.6 |
|
Repeatability (linear) |
micron |
1 |
| Repeatability (rotary) | arc-sec | 1 |
|
Speed |
mm/sec |
200 |
| Load weight | kg | 2 |
|
Stage weight |
kg |
44 |