XYZR BSMA-750x750+LSZ12W+PSR150-30
- XY stroke 750 x 250 mm
- Lift 12 mm
- Rotation unlimited
- Integrated solution
Integrated turn-key system consists of XY system BSMA motorized ball screw actuators, and Lift-Rotary stage LSZ-12+PSR-150-30 stage
Clean room version available.
 XYZR LSMA-200x200+MLVT100-25+RTHM190 LSMA200+MLVT25-RTHM190 XY Stroke 200x200 mm Lift stroke 25 Rotation unlimited Load 10 Kg |
 XYZR LSMA-100x100+MLVT70-13+RTHM151 LSMA100+MLVT13+RTHM151 XY Stroke 100x100 mm Lift stroke 13 Rotation unlimited Load 5 Kg |
 XYZR LSM600x600+LSMZ90-12+RTHM100 LSM600+LSMZ12+RTHM100 XY Stroke 450x450 mm Lift stroke 12 Rotation unlimited Load 5 Kg |
|
XY Stage BSMA-110
|
Spec |
Lift Stage LSZ-12W |
Spec |
Rotary Stage PSR150-30 |
Spec |
|
Stroke (mm) |
750x250 |
Lift (mm) |
12 |
Rotation |
unlimited |
|
Repeatability (µm) |
5 |
Repeatability (µm) |
2 |
Repeatability (arc-sec) |
2 |
|
Resolution (µm) |
1 |
Resolution (arc-sec) |
1 |
Resolution (arc-sec) |
2 |
|
Load capacity (kg) |
12 |
Bearings |
ball |
Bearings |
ball |
|
Velocity (mm/sec) |
400 |
Max velocity (mm/sec) |
12 |
Angular velocity (rpm) |
300 |
|
Mechanism, screw lead (mm)
|
ball screw 20 |
Mechanism |
ball-screw/wedge |
Mechanism |
direct drive rotary motor |
|
Motor |
stepper servo |
Motor |
stepper servo |
Motor |
servo |
