XYZR-BSMA-058U-120x120-LSZ-8S-ACR-32UT
Combination of XY ball-screw driven BSMA XY stages with Lift LSZ stages and direct drive rotary table
- XY stroke 120x120 mm
- Lift 8 mm
- Unlimited rotation
XY stage BSMA-058U |
Spec |
Lift Stage LSZ-8S |
Spec |
Rotary Stage ACR32UT |
Spec |
Stroke (mm) |
120 x 120 |
Lift (mm) |
8 |
Rotation |
unlimited |
Repeatability (µm) |
5 |
Repeatability (µm) |
2 |
Repeatability (arc-sec) |
1 |
Resolution (µm) |
0.25 |
Resolution (µm) |
0.25 |
Resolution (arc-sec) |
0.9 - 3.6 |
Load capacity (kg) |
10 |
Lift translation (mm/rev) |
2.33 |
Torque (Nm) |
2.2 |
Velocity (mm/sec) |
180 (servo) |
Max velocity (mm/sec) |
25 |
Angular velocity (rpm) |
1400 |
Mechanism, screw lead (mm) |
ball-screw 2.5 |
Mechanism, screw lead (mm) |
direct drive screw 2.33 |
Mechanism |
direct drive |
Motor |
stepper servo |
Motor |
stepper/encoder |
Motor |
Three phase brushless |