Lift LSMA-200+XY LSMA167-25x25
- Lift stroke 100 mm
- XY travel 25 x 25 mm
- Rotary stage optional
- Integrated solution
This system is a combination of linear actuator LSMA-200, vertical stroke 100 mm, and XY table LSMA-167, travel 25 x 25 mm.
Different stages combination and travel strokes are available upon request.
Rotary stage RTHM-190 can be installed, as an option.
|
Lift stage LSMA-200 |
Spec |
XY stage XY-LSMA-167-25x25 |
Spec |
Rotary Stage (Optional) RTHM-190 |
Spec |
|
Stroke (mm) |
100 ... 200 |
XY stroke (mm) |
25 x 25 |
Rotation |
unlimited |
|
Repeatability (µm) |
1 |
Repeatability (µm) |
1 |
Repeatability (arc-sec) |
20 |
|
Resolution (µm) |
0.25 |
Resolution (arc-sec) |
0.25 |
Resolution (arc-sec) |
2 |
|
Load capacity (kg) |
4 |
Lift translation (mm/rev) |
0.25 lead screw 1 ball screw |
Torque (Nm) |
1 |
|
Velocity (mm/sec) |
20 (servo) |
Max velocity (mm/sec) |
20 (servo) |
Angular velocity (rpm) |
8 |
|
Mechanism, screw lead (mm) |
lead-screw 0.5 |
Mechanism, screw lead (mm) |
lead screw 0.25 ball screw 1 |
Mechanism, ratio |
worm gear 180:1 |
|
Motor |
stepper servo |
Motor |
stepper |
Motor |
stepper servo |
