XY-OF-100x100J-MLVT-25J-RTLA-30-100HJ
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XY Stroke 100x100 mm Lift stroke 25 Rotation unlimited Load 6 Kg |
Combination of XY ball-screw driven open frame XY stages with Lift MLVT stages and compact worm gear rotary RTLA table
- XY stroke 100x100 mm
- Lift 25 mm
- Unlimited rotation
|
XY stage XY-OF-J-100x100 |
Spec |
Lift Stage MVLT-25J |
Spec |
Rotary Stage RTLA-30-100HJ |
Spec |
|
Stroke (mm) |
100 x 100 |
Lift (mm) |
25 |
Rotation |
unlimited |
|
Repeatability (µm) |
10 |
Repeatability (µm) |
10 |
Repeatability (arc-sec) |
20 |
|
Resolution (µm) |
1 (with encoder) |
Resolution (arc-sec) |
Motor and driver dependent |
Load (kg) |
30 |
|
Load capacity (kg) |
10 |
Weight (kg) |
2.5 |
Weight (kg) |
1.8 |
|
Velocity (mm/sec) |
80 |
Max velocity (mm/sec) |
20 |
Angular velocity (rpm) |
15 |
|
Mechanism, screw lead (mm) |
ball-screw 4 |
Mechanism, screw lead (mm) |
belt 1 |
Mechanism, ratio |
worm gear 45:1 |
|
Motor |
stepper, stepper/encoder |
Motor |
stepper/servo/encoder/ Smart |
Motor |
stepper servo |
