Combination of XY ball-screw driven open frame XY stages with Lift MLVT stages
- XY stroke 100x100 mm
- Lift 50 mm
XY stage XY-OF-J-100x100 |
Spec |
Lift Stage MLVT-50J |
Spec |
Stroke (mm) |
100 x 100 |
Lift (mm) |
50 |
Repeatability (µm) |
10 |
Repeatability (µm) |
10 |
Resolution (µm) |
1 (encoder) |
Resolution (arc-sec) |
Motor and driver dependent |
Load capacity (kg) |
10 |
Lift translation (mm/rev) |
1 |
Velocity (mm/sec) |
80 |
Max velocity (mm/sec) |
20 |
Mechanism, screw lead (mm) |
ball-screw 4 |
Mechanism, screw lead (mm) |
belt 1 |
Motor |
stepper, stepper/encoder |
Motor |
stepper, servo/encoder/SMART |