Combination of XY ball-screw driven BSMA XY stages with Lift MLVT stages
- XY stroke 300x300 mm
- Lift 25 mm
XY stage BSMA-LY-140H-300x300 |
Spec |
Lift Stage MLVT-25J |
Spec |
Stroke (mm) |
300 x 300 |
Lift (mm) |
25 |
Repeatability (µm) |
10 |
Repeatability (µm) |
10 |
Resolution (µm) |
|
Resolution (arc-sec) |
Motor and driver dependent |
Load capacity (kg) |
16 |
Lift translation (mm/rev) |
1 |
Velocity (mm/sec) |
25 (servo) |
Max velocity (mm/sec) |
40 |
Mechanism, screw lead (mm) |
ball-screw 4 |
Mechanism, screw lead (mm) |
belt 1 |
Motor |
stepper servo |
Motor |
stepper |