Combination of XY ball screw driven BSMA-LY-140H stages and worm gear rotary RTLA-30-100 table
- XY stroke 100x100 mm
- Unlimited rotation
XY stage |
Spec |
Rotary Stage |
Spec |
Stroke (mm) |
100 x 100 |
Rotation |
unlimited |
Repeatability (µm) |
±10 |
Repeatability (arc-sec) |
36 |
Resolution (µm) |
1 |
Resolution (arc-sec) |
1 |
Load capacity (kg) |
10 |
Torque (Nm) |
1 |
Velocity (mm/sec) |
100 (servo/encoder) |
Angular velocity (rpm) |
5 |
Mechanism, screw lead (mm) |
ball-screw, 4 |
Mechanism, ratio |
worm gear 180:1 |
Motor |
stepper/servo |
Motor |
stepper |