Combination of XY ball screw driven LSMA stages and worm gear rotary RTHM table
- XY stroke 100x100 mm
- Unlimited rotation
XY STROKE 100 x 100 mm
ROTATION UNLIMITED
XY stage LSMA-200-100x100 |
Spec |
Rotary Stage RTHM-191 |
Spec |
|
|
|
|
Stroke (mm) |
100 x 100 |
Rotation |
unlimited |
Repeatability (µm) |
1 |
Repeatability (arc-sec) |
10 |
Resolution (µm) |
0.3 |
Resolution (arc-sec) |
1 |
Load capacity (kg) |
12 |
Torque (Nm) |
1 |
Velocity (mm/sec) |
10 (stepper) 20 (servo) |
Angular velocity (rpm) |
8 |
Mechanism, lead (mm) |
ballscrew 0.5 |
Mechanism, ratio |
worm gear 180:1 |
Motor |
stepper, servo, SMART |
Motor |
stepper. servo, SMART |
Dimensions (W x Lx H mm) |
360 x 360x 85 |
Dimensions (Dia x H mm) |
100 x 32 |