XYZR LSM600x600+LSMZ90-12+RTHM100
Combination of XY Planar Air bearing table with RotoLinear Air bearing Lift-Rotary stages.
- XY stroke 450x450 mm
- Lift 12 mm
- Unlimited rotation
 XYZR LSMA-200x200+MLVT100-25+RTHM190 LSMA200+MLVT25-RTHM190 XY Stroke 200x200 mm Lift stroke 25 Rotation unlimited Load 10 Kg |
 XYZR LSMA-100x100+MLVT70-13+RTHM151 LSMA100+MLVT13+RTHM151 XY Stroke 100x100 mm Lift stroke 13 Rotation unlimited Load 5 Kg |
 XYZR BSMA-750x750+LSZ12W+PSR150-30 XYZR-BSMA+LSZ12+PSR150 XY Stroke 750x250 mm Lift stroke 12 mm Rotation unlimited Load 10 Kg |
|
XY Planar System
|
Spec |
Lift Stage L90-12 |
Spec |
Rotary Stage R100 |
Spec |
|
Stroke (mm) |
450 x 450 |
Lift (mm) |
12 |
Rotation |
unlimited |
|
Repeatability (µm) |
3 |
Repeatability (µm) |
2 |
Repeatability (arc-sec) |
1 |
|
Resolution (µm) |
1 |
Resolution (arc-sec) |
1 |
Resolution (arc-sec) |
1 |
|
Load capacity (kg) |
5 |
Bearing |
air |
Bearing |
air |
|
Velocity (mm/sec) |
500 |
Max velocity (mm/sec) |
50 |
Angular velocity (rpm) |
120 |
|
Mechanism
|
direct drive linear motor |
Mechanism |
direct drive linear motor |
Mechanism, ratio |
direct drive rotary motor |
|
Motor |
stepper servo |
Motor |
stepper servo |
Motor |
stepper servo |
