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XY-XYZ stages LSMA-175

X, Y, Z stroke

50, 100, 150, 200 mm

resolution

0.3 µm

load

horizontal 8 kg

vertical 3 kg

XY-LSMA-175-150x150

XY stroke 150x150 mm

Load horiz. 8 Kg

Load vertical 3 Kg

XY-LSMA-175-200x200

XY stroke 200x200 mm

Load horiz. 8 Kg

Load vertical 3 Kg

XY-LSMA-175-50x50

XY stroke 50x50 mm

Load horiz. 8 Kg

Load vertical 3 Kg

XYZ-LSMA-175-200x200x100

XYZ stroke 200x200 mm

Load horiz. 8 Kg

Load vertical 3 Kg

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