Motorized XY and XYZ stages
These actuators are still manufactured but not standard stock products
XY-XYZ stages LSMA-50
|
X, Y, Z stroke |
100, 150, 200 mm |
|
resolution |
0.05 µm |
|
load |
horizontal 30 kg vertical 8 kg |
XY-XYZ stages LSMA-184
|
XYZ stroke |
13x13x13 mm |
|
resolution |
0.15 µm |
|
load |
horizontal 10 kg vertical 3 kg |
XY-XYZ stages LSMA-175
|
X, Y, Z stroke |
50, 100, 150, 200 mm |
|
resolution |
0.3 µm |
|
load |
horizontal 8 kg vertical 3 kg |