XY-XYZ stages LSMA-167
X, Y, Z stroke |
25, 50, 100 mm |
resolution |
0.1 µm |
load |
horizontal 7 kg vertical 3 kg |
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X, Y, Z stroke |
25, 50, 100 mm |
resolution |
0.1 µm |
load |
horizontal 7 kg vertical 3 kg |