XY-OF-UL-350x350
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Open-frame XY stages designed with a low profile for a wide range of automated accurate positioning applications. The drive mechanism located on the side of the unit and offers a clear unobstruced two axes aperture to enable light or objects to pass through the center of travel.
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Model | Unit |
XY-OF-UL 200x200 |
XY-OF-UL 280x280
|
XY-OF-UL 350x350
|
Stroke XY | mm | 200x200 | 280x280 | 350x350 |
Aperture | mm | 200x200 | 260x260 | 335x335 |
Table top | mm | 300x300 | 434x435 | 515x515 |
Height | mm | 82 | 88 | 91 |
Accuracy | micron | 10 | 20 | 25 |
Backlash | micron |
5 (ball screw) 0 (linear motor/encoder) |
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Straightness | micron | 10 | 15 | 20 |
Resolution | micron | 1.25 | ||
Motor type |
Brushless Servo/Encoder (standard) Linear motor/encoder (option) |
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Repeatability | micron |
5 (ball screw) 1 (linear motor/encoder) |
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Load capacity | kg | 40 | ||
Table weight | kg | 10 | 14 | 18 |
Max speed | mm/sec |
300 (ball screw) 600 (linear motor) |