Integrated multi-axes XYZ stagesbuilt with LSMA-175 Series motorized linear actuators provide travel up to 200 mm. Driven by a brushless or stepper motor with a precision ground ball screw this motorized stages offers high-resolution up to 0.1 micron. Linear actuator has low profile high-stability compact and monolithic design as its main feature and together with its high resolution makes the device ideal for its integration in high precision measurement and manufacturing systems.
Shown XYZ system with travel area 100 mm x 100 mm x 100 mm