News - Compact Direct Drive Rotary Stage ACR032UT
ULTRA COMPACT, ULTRA THIN DIRECT DRIVE ROTARY STAGE ACR-32UT
LOW PROFILE , LARGE APERTURE
The ACR-32UT precision rotation stage is the lowest profile rotary table with high-speed direct-drive rotary servo motor on the market.
32 mm center aperture and lightweight construction makes this rotary stage an ideal choice for handling 300-mm silicon wafers for semiconductor processing
HIGH PRECISION, HIGH DYNAMICS
ACR-32UT has very wide dynamic speed range and can move at sub-rpm speed with low velocity ripple and accelerate quickly to 1500 rpm.
This stage can be easily installed into IntelLiDrives low profile open frame XY tables with a minimal stack-up height to minimize Abbe error
MULTI-AXIS CONFIGURATION
These features make the ACR-32UT outperform the stability, acceleration and settling speed of traditional servo motor gear-driven mechanisms.
IntelLiDrives offers a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.