DIRECT DRIVE

ROTARY TABLES

RotoRing^TM Series

RotoRing^TM Series rotary actuators provide superior angular positioning and are designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives.

 

They combine axial brushless RotoLinear^TM motoring modules and planar air bearings integrated in a compact, direct drive configuration rotary tables. Large area air bearings provide sufficient payload stiffness and maximizes performance in respect to wobble and

run-out.

 

Radially distributed RotoLinear^TM motoring modules provide high positioning stiffness during rotary indexing and when installed on moving XY tables.

 

These rotary tables provide unlimited rotation and are capable of precise positioning and velocity controls when used with micro-stepping drives. Can also be equipped with IntelLiCoder feedback for closed loop operation.

 

RotoRings^TM rotary tables can be mounted in any orientation and have "large open center design". When used in processing 12" semiconductor wafers, every area of the wafer can be accessed.

 

In general automation applications large open center offers the opportunity to access parts from inside and outside of the table simultaneously. This feature allows robotic devices, pick and place and ancillary tooling to be mounted inside the table, saving floor space and reducing parts handling with increased productivity.

 

See also ServoRing™ Series rotary tables  for high capacity high speed rotary table applications.

 

   Features

· low profile

· high resolution
· large center aperture
· radial and axial air bearings

· can be mounted in any orientation

· direct drive RotoLinear™ motoring  modules
 

 Specifications

(model and system dependent)

· torque 10-50 Nm

· resolution 2-10 arc-sec
· accuracy 10-20 arc-sec
· runout 5-10 microns

· table height 37-45 mm

· table OD 150-450 mm

· table ID 50-350 mm